Agaciro kagereranijwe nubushuhe bugereranije mucyumba gisukuye (FAB) icyumba gisukuye

Agaciro kagereranijwe k'ubushuhe bugereranije mucyumba gisukuye (FAB) icyumba gisukuye kigera kuri 30 kugeza kuri 50%, bigatuma habaho intera ntoya yamakosa ya ± 1%, nko muri lithographie - cyangwa ndetse no munsi yo gutunganya ultraviolet kure (DUV) zone - mugihe ahandi irashobora kuruhuka kugeza ± 5%.
Kuberako ubuhehere bugereranije bufite ibintu byinshi bishobora kugabanya imikorere rusange yibyumba bisukuye, harimo:
1. Gukura kwa bagiteri;
2. Icyumba cy'ubushyuhe bwo mucyumba abakozi;
3. Amafaranga yishyurwa rya electrostatike aragaragara;
4. Kubora ibyuma;
5. Umuyoboro wamazi wamazi;
6. Gutesha agaciro imyandikire;
7. Kwinjiza amazi.

Indwara ya bagiteri nibindi byanduza ibinyabuzima (molds, virusi, fungi, mite) birashobora gutera imbere mubidukikije bifite ubuhehere burenze 60%. Imiryango imwe ya bagiteri irashobora gukura mubushuhe burenze 30%. Isosiyete yizera ko ubuhehere bugomba kugenzurwa mu kigero cya 40% kugeza kuri 60%, ibyo bikaba bishobora kugabanya ingaruka za bagiteri n'indwara z'ubuhumekero.

Ubushuhe bugereranije buri hagati ya 40% na 60% nabwo ni urwego ruciriritse rwo guhumuriza abantu. Ubushuhe bwinshi burashobora gutuma abantu bumva bafite ibintu byinshi, mugihe ubuhehere buri munsi ya 30% bushobora gutuma abantu bumva uruhu rwumye, rwacitse, guhumeka neza no kutishimira amarangamutima.

Ubushuhe buri hejuru bugabanya kwirundanya kwishyurwa rya electrostatike hejuru yisuku - igisubizo cyifuzwa. Ubushuhe buke nibyiza gukusanya amafaranga kandi bishobora kwangiza isoko ya electrostatike. Iyo ubuhehere bugereranije burenze 50%, amashanyarazi ya electrostatike atangira gukwirakwira vuba, ariko mugihe ubuhehere bugereranije buri munsi ya 30%, burashobora kumara igihe kinini kuri insulator cyangwa hejuru yubutaka.

Ubushuhe bugereranije buri hagati ya 35% na 40% burashobora gukoreshwa nkubwumvikane bushimishije, kandi ibyumba bisukuye bya semiconductor muri rusange bikoresha ubundi bugenzuzi kugirango bigabanye kwishyuza amashanyarazi.

Umuvuduko wibintu byinshi bivura imiti, harimo na ruswa, biziyongera hamwe no kwiyongera kwinshi. Ubuso bwose bwerekanwe numwuka ukikije icyumba gisukuye birihuta.